Structural transformations of TiO2 films with deposition temperature and electrical properties of nanostructure n-TiO2/p-Si heterojunction diode
Yazarlar (2)
Doç. Dr. Seval AKSOY PEHLİVANOĞLU Sinop Üniversitesi, Türkiye
Prof. Dr. Yasemin Çağlar Anadolu Üniversitesi, Türkiye
Makale Türü Özgün Makale (SSCI, AHCI, SCI, SCI-Exp dergilerinde yayınlanan tam makale)
Dergi Adı JOURNAL OF ALLOYS AND COMPOUNDS (Q1)
Dergi ISSN 0925-8388 Dergi Bilgileri (2014)
Dergi Tarandığı Indeksler SCI-Expanded
Makale Dili İngilizce Basım Tarihi 11-2014
Cilt / Sayı / Sayfa 613 / 0 / 330–337 DOI 10.1016/j.jallcom.2014.05.192
Makale Linki http://dx.doi.org/10.1016/j.jallcom.2014.05.192
UAK Araştırma Alanları
Yarı İletkenler
Özet
Titanium oxide (TiO2) films have been deposited on p-Si substrates by sol–gel method using spin coating technique. Structural and morphological properties were studied as a function of deposition temperatures by X-ray diffraction (XRD) and field emission scanning electron microscopy (FE-SEM). The deposition temperatures were chosen from 700 °C to 1100 °C. Crystallization of the anatase phase and its transformation to the rutile phase were observed at 700 °C and 800 °C, respectively. The fabrication of nanostructure n-TiO2/p-Si heterojunction diode was formed by using T7 film deposited at 700 °C. The electrical parameters such as barrier height (ϕb) and ideality factor (n) of nanostructure n-TiO2/p-Si heterojunction diode were investigated by using I–V measurements and observed to be 0.58 eV and 5.39, respectively. Also, the values of ϕb and series resistance (Rs) were determined by using Cheung’s …
Anahtar Kelimeler
TiO2 film | Sol gel spin coating | Nanostructure | Ideality factor | Conduction mechanism